A study of yield improvement for TFT-LCD withcopper process
碩士 === 國立中興大學 === 光電工程研究所 === 102 === In this study, the inverted-staggered thin film transistors were used to investigate the yield improvement of devices with copper process. We utilized the different metal materials that were deposited as the metal I electrode and different clean methods in metal...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19959479361836482528 |