An Exploration of Research on the Liquid Switch of MEMS for Feedthrough
碩士 === 明新科技大學 === 電子工程研究所 === 102 === In vacuum society, the feedthrough has been widely employing. Its precision structure is unconstrained damaged by chafe, after long time running. Based on this result, the feedthrough has to be repeatedly overhauled or exchanged it at great expense. For the reas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15524084680694579234 |