| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === MEMS English for Micro-Electro-Mechanical-Systems (MEMS). MEMS includes part mini-sensors, micro-actuators and corresponding processing circuits, etc., it is the integration of a variety of micro-machining techniques, and apply developed on the basis of the latest achievements of modern technology on high technology.
In recent years, the ever-changing consumer electronics products, owned by more and more features, including a GPS or other positioning systems, but in skyscrapers or mountain wilderness, often because of weak signal can not be accurately positioned, and this experiment is the micro pressure sensor as an altimeter use, it can be used to calculate the height of the pressure measured at the location, and then with GPS satellites to improve its accuracy and more effective positioning.
The study was designed in four different mask, respectively Case1, Case2, Case3 and Case4, change the position difference is the size of the piezoresistive film, after current through meditation investigate the electrical characteristics, linearity and dynamic differences in response, its resistance to understand the different resolution, select the appropriate components for improvement and study of the following connection, sensors will be incorporated after the TSV with another sensor to the measurement element is not only one, but rather reduced in size, to achieve the pluripotent effects.
|
|---|
