The Design and Characteristic of Micro-pressure sensor
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === MEMS English for Micro-Electro-Mechanical-Systems (MEMS). MEMS includes part mini-sensors, micro-actuators and corresponding processing circuits, etc., it is the integration of a variety of micro-machining techniques, and apply developed on the basis of t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/uctmmq |