Effects of sputtering power and substrate temperature on high dielectric constant thin films and it’s applications to MIM on-chip capacitors
碩士 === 崑山科技大學 === 電腦與通訊研究所 === 102 === Transparent conductive film refers to the visible light range with a high transmittance rate, and has good electrical conductivity of the film, due to the nature of special optical and electronic properties can be applied in various fields. The aluminum nitride...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77338402837329280060 |