The electro-optical characteristics of IGZO Films deposited by co-sputtering and its H2 sensing application
碩士 === 崑山科技大學 === 光電工程研究所 === 102 === In this study, RF magnetron co-sputtering was used to grow IGZO films on glass substrates. The films were obtained by changing work pressure, process time, and RF power. The IGZO samples were treated by DC bias and changed with various concentration of oxygen to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25605489721782821831 |