An Investigation on Scribing Process on Semiconductor Using Advanced Laser Technology
碩士 === 義守大學 === 機械與自動化工程學系 === 102 === In this research, an advanced picosecond Laser machine is applied to different materials used on semiconductor. Based on beam path, speed, repetition rate, power and focus position, a series of comprehensive experiments has been performed in this paper. In the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/dmdzsf |