Titanium dioxide optical thin film deposited by plasma-assisted DC sputtering deposition

碩士 === 輔仁大學 === 物理學系碩士班 === 102 === In this study ,we coat titanium dioxide optical films by the DC sputtering system and adding plasma source fluxing way. In general, optical films must have a good stable refractive index and absorption of small features, titanium dioxide in multilayer applications...

Full description

Bibliographic Details
Main Authors: YONG-SHENG SYU, 許永勝
Other Authors: Jin-Cherng Hsu
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/54430441664798500475