Titanium dioxide optical thin film deposited by plasma-assisted DC sputtering deposition
碩士 === 輔仁大學 === 物理學系碩士班 === 102 === In this study ,we coat titanium dioxide optical films by the DC sputtering system and adding plasma source fluxing way. In general, optical films must have a good stable refractive index and absorption of small features, titanium dioxide in multilayer applications...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/54430441664798500475 |