Fabrication and Application of Capacitive Microsensors on Microfluidic Platforms
碩士 === 逢甲大學 === 自動控制工程學系 === 102 === The research designs capacitive microsensors on microfluidic disc using microelectromechanical system (MEMS) technology. The main structure is interdigitated capacitor. The capacitive microsensors can multiplexed synchronous detection, and have faster response sp...
Main Authors: | Wen-Tse Chang, 張文澤 |
---|---|
Other Authors: | Hsing-Cheng Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/12042571433709699241 |
Similar Items
-
Design and Fabrication of Capacitive Electrostatic Microsensors
by: Chih-Shiang Yu, et al.
Published: (2008) -
Fabrication and Measurement of Capacitive Electrostatic Microsensors
by: Po-Shun Yang, et al.
Published: (2012) -
The Capacitive Mechanical Microsensors Using MPMC Process
by: E-NAN Chang, et al.
Published: (2002) -
Mechanical properties of silicon films and capacitive microsensors
by: Ding, Xiaoyi
Published: (1990) -
Fabrication Study on the Glucose Microsensors with Planar Electrodes
by: Pai-Yu Chang, et al.
Published: (2004)