Fabrication and Application of Capacitive Microsensors on Microfluidic Platforms
碩士 === 逢甲大學 === 自動控制工程學系 === 102 === The research designs capacitive microsensors on microfluidic disc using microelectromechanical system (MEMS) technology. The main structure is interdigitated capacitor. The capacitive microsensors can multiplexed synchronous detection, and have faster response sp...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/12042571433709699241 |