Gas Microsensors Based on the Nanoporous Structures
碩士 === 逢甲大學 === 自動控制工程學系 === 102 === The research develops self-assembled anodic titanium oxide arrays fabricated by anodization and combines the microheater and temperature sensor manufactured by the photolithography and life-off process of the micro-electro-mechanical system technology to selectiv...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72631288731412096447 |