Matching of Range Pattern with Don't-Cares for Process-Hotspot Detection
碩士 === 元智大學 === 資訊工程學系 === 101 === A process-hotspot is a layout pattern detrimental to chip's fabrication yield. With continuing use of 193nm lithography for advanced technology nodes, the number of layout patterns that represent process hotspots increases dramatically. Hence, layout pattern d...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/56321622963458242508 |