A Finite Element Study on the Effects of Different Stress States on the Mechanical Properties of Thin Films
碩士 === 大同大學 === 機械工程學系(所) === 101 === The thin film technology is an important part of MEMS and semiconductor manufacturing process. However, in the coating process, the effect of high energy ion bombardment will bring films a great residual stress. It makes the surface of products deformation, and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50108998783569832167 |