| Summary: | 碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 101 === This study aimed to investigate the energy consumption of manufacturing facilities, typically those found in a semiconductor fabrication plant, using the Energy Conversion Factor (EFC) based approach.The EFC approach proposes the opearating schedules of a wide range of semiconductor manufacturing equipment (such as Process, Idle, Standyby and Stop), provides the assessment on the energy throughput and the reduction of resource consumption, and converts various semiconductor manufacturing equipment utility consumption rates into the equivalent annual energy usage. The assessment of energy consumption and conservation on semiconductor facilities can be used as the means to improve the existing tools and the design of equipment in order to assure the optimal energy use and product quality.The variegated operating parameters of various components in the key equipment systems in a semiconductor manufacturing plant, including the exhaust system, vacuum system, compressed dry air system, chilled watr system, water purification system, etc., are also included in the study. The resulting outputs were converted into the unit of kWh/year. Also, the operating setting of various equipment and facilities in a semiconductor manufacturing plant were compared and applied to generate the ECF values, which serves as the baseline for energy conservation simulation. By varying the setting of these operating parameters in the ECF simulation software, the utility usage and optimum operating setting for respective component and system can be generated.
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