Study of equipment energy consumption calculate and improve in high tech Fab
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 101 === This study aimed to investigate the energy consumption of manufacturing facilities, typically those found in a semiconductor fabrication plant, using the Energy Conversion Factor (EFC) based approach.The EFC approach proposes the opearating schedules of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pk7vw2 |