Functionalized Carbon Nanotube Gas Sensor and Photosensitive Sensor with CMOS Process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 101 === The study demonstrates the low temperature fabrication of CMOS compatible gas sensor based on CNTs. To begin with, the SiO2 on the silicon wafer was modified by APTS in order to form an aminoterminated (–NH2) self-assembled monolayer (SAM), which could facilit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4be293 |