Control of Molybdenum Sputtering Targets and their Thin Film Characteristics
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 101 === In this study, we aim to understand the microstructure of molybdenum sputtering targets and to analyze their thin film characteristics for TFT-LCD buffer layer. The results show that the density of molybdenum ingot raise from 95.47% to 99.47% and 99.51% aft...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w4vxvt |