A Study on The Preparation of A Surface-Textured Amorphous Titanium Oxide Thin Film by Twice Deposition Method and Its Photocatalytic Activity

• Main Authors: Yi-Shan Lu, 呂依珊
• Other Authors: Day-Shan Liu
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/kfed93

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 101 === In this study, an amorphous titanium oxide thin film was prepared plasma enhanced chemical vapor deposition(PECVD) at a substrate temperature of 150 ℃ using titanium- tetraisopropoxide(TTIP) and oxygen as source material. Surface-textured TiOx base layer was prepared by selectively pre-irradiating on the film through an alumina membrane mask and and then etching by the dilute hydrofluoric (HF) solution. A second layer of amorphous titanium oxide thin film was deposited on the surface-textured TiOx base layer by twice deposition . The surface morphologies and roughness of the amorphous surface-textured TiOx base layer affected by the UV light pre-irradiation were conducted from AFM and FE-SEM investigations. Roughness of surface-textured TiOx base layer is 22.47 nm,, accordingly, a rough surface with nano-textured morphology, which corresponded to a large specific surface area compared to the amorphous titanium oxide thin film. Surface morphology of surface-textured TiOx base layer is distribution of columnar structure. Fourier transform infrared spectroscopy analysis shows the surface textured of amorphous titanium oxide thin film adsorbed F- on the film surface during fluorination process resulted in the change on the surface hydroxyl groups and the formation of the Ti−F chemical state, which increased the adsorption capacity for water molecules and its surface adsorption of fluoride ions can enhance photocatalytic properties. The amorphous surface-textured TiOx base layer of methylene blue degradation reaction rate constant was 0.0204 K / min. The second amorphous titanium oxide film is deposited on surface-textured TiOx base layer, and its reaction rate constant of methylene blue was 0.0249 K / min. The surface roughness of surface-textured TiOx bilayer is up to 30.09 nm. Amorphous titanium oxide film after the heat treatment process will enhance photocatalytic properties, but the film in the low heat resistance can not be applied. The structure of amorphous titanium oxide film is deposited on the fluorinated amorphous titanium oxide base layer will enhance the photocatalytic properties.