Enhancement of Magnetic Property in FePd Thin Film by Rapid Thermal Annealing
碩士 === 國立臺灣科技大學 === 機械工程系 === 101 === In project (A), FePd continuous films were deposited onto Si substrate by thermal evaporation method film with thickness 75 nm. By using Rapid Thermal Annealing technique, the FePd films were heated (0,10, 15,25,30,40,60,90) minutes under 500oC. Then the magneti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47033977215674983242 |