Fabrication of parylene based capacitive ultrasound transducers
碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === In this thesis parylene based capacitive ultrasound transducers was fabricated the electrical and mechanical characteristic of capacitive micromachined ultrasound transducer (CMUT) was analyzed. Ultrasound transducer plays a critical role and is widely used in...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/25905357518546237211 |