A CMOS-MEMS Metal-based Capacitive Tactile Sensor
碩士 === 國立臺灣大學 === 電子工程學研究所 === 101 === In this research, CMOS MEMS tactile sensors using a pure metal-based structure to monitor non-invasive blood flow were developed. The sensors were fabricated through a commercial 0.35μm 2 polysilicon and 4 metal CMOS technology by the self-developed post proces...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/92203722801076620327 |