CMOS-Based Multiple Parallel Plate Capacitive Tactile Sensors for Human Pulse Sensing Application
碩士 === 國立臺灣大學 === 電子工程學研究所 === 101 === In this research, capacitive tactile sensors based on CMOS MEMS process were developed. Two sensing capacitors were integrated in one sensor structure for tactile sensing. The fabrication of sensor chips was based on the TSMC 1P6M 0.18 μm CMOS MEMS process. To...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72319813126205431444 |