Experimental Analysis of a Pulsed Inductively Coupled Linear Plasma Source
碩士 === 國立清華大學 === 工程與系統科學系 === 101 === The purpose of this study is to develop a pulsed inductively coupled linear plasma source, and analyze the temporal and spatial behavior of plasma characteristic parameters. In this research, we has successfully developed a pulsed inductively coupled linear...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40639363625242533241 |