Plasma Process Induced Damage Effect on Low Temperature Poly-Silicon Thin Film Transistors
博士 === 國立清華大學 === 工程與系統科學系 === 101 === Low temperature polycrystalline silicon (LTPS) technology is the most promising technology to manufacture high performing thin film transistors (TFTs). LTPS TFT with high mobility can reduce device size more than the conventional amorphous silicon TFT. To achie...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66165290933503552864 |