Design of a Low Phase Noise Reference Oscillator Based on Fully Differential Micromechanical Resonators
碩士 === 國立清華大學 === 動力機械工程學系 === 101 === In this work, we realize the low-polarization-voltage (Vp) capacitive MEMS oscillators implementing vacuum packaged 50nm-gap Lamè-mode silicon micromechanical resonators and investigate their phase noise performance. Single-crystal-silicon square-plate micror...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31394030733274500988 |