X-Ray Surface Diffraction Studies of Nanometer Silicon Wires

碩士 === 國立清華大學 === 物理系 === 101 === This work aims to allow wide-angle X-rays to incident into nanometer silicon wires at the photon energy 8.8785keV. Nanometer silicon wires were prepared on a [0 0 1] silicon wafer with 3μm high, 5mm long along [1 1 0] direction, 450nm to 20μm wide. The major result...

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Bibliographic Details
Main Authors: Chu, Pei-Tzu, 朱培慈
Other Authors: Chang, Shih-Lin
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/44133071411581345556

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