Study on the effects of copper process on the a-IGZO thin film transistor
碩士 === 國立交通大學 === 顯示科技研究所 === 101 === In this work, the influence of copper process on amorphous type Indium Gallium Zinc Oxide (a-IGZO) thin film transistor’s (TFTs) transfer curve is studied. By comparing the TFTs characteristics with Ti/Al/Ti source/ drain and Cu/Ti source/drain, we observed that...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34242977530889650372 |