| Summary: | 碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 101 === The light-emitting diode manufacturing (Light Emitting Diode, LED) Auto spin coater, and analysis and simulate the cabinets situational in developing process is studied numerically. The chemicals used in the photoresist program area is divided into, whose main component is propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), and the above compounds are the volatile organic gas and has a very low odor threshold value. If we not controlled well, the employees inbreathe the organic gas will produce discomfort.
Additionally, long exposure in this environment may also lead to the occurrence of other occupational diseases and increase the health hazard of operators. In this paper,
we use the CFD as the simulation software for this machine, to discover the analog fan filter unit (FFU) working in various gas field environment. FFU conditions were
set at 0.6 m of the original design and to 0.1 m / s of not blowing (0 m / s), respectively. We research the fugitive source diffusion by observed for 10 minutes, 15 minutes and 20 minutes, the total of 9 kinds scenario to simulation the 36 kinds dynamic cross-sectional view. Summary graphics simulation results, the condition of the FFU without the air supply(0 m / s), exhaust the cabinets by local exhaust equipment will make the box present a negative pressure state, which can reach the, peculiar smell diffuse get good improvemen
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