Auto Spin Coater Peculiar Smell Leak Investigation
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 101 === The light-emitting diode manufacturing (Light Emitting Diode, LED) Auto spin coater, and analysis and simulate the cabinets situational in developing process is studied numerically. The chemicals used in the photoresist program area is divided into, whose m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16672207796697360545 |