Mining and Predicting Abnormal Process Equipments
碩士 === 國立交通大學 === 管理學院資訊管理學程 === 101 === The semiconductor industry has become the mainstream technology industry in Taiwan. In the wafer production process, how to avoid issues such as wafer flaws and defects, and to improve product yield and production capacity and reduce costs has become the majo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82848742512378827369 |