The application of disilane-plasma deposition technology in silicon-based thin-film solar cells
碩士 === 國立交通大學 === 光電工程學系 === 101 === In this article, we investigate the performance of hydrogenated amorphous silicon-based thin-film fabricated by high-density plasma chemical vapor deposition system. The solar spectra in near infrared regime (<750 nm) can not be effective absorbed due to the h...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86011432770879788436 |