Design of a flexure scanner for surface profilometer
碩士 === 國立交通大學 === 機械工程系所 === 101 === The purpose of this thesis is to design a scanner for profilometer. We use flexure mechanism to complete the guidance of stage and verify the feasibility of design by ANSYS software. Finally, we combine this scanner with commercial surface profilometer module. Th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42131617022406826904 |