Characterizations of Amorphous InGaZnO Thin Film Transistors Using High-k ZrO2 and HfO2 Dielectrics

碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 101 === Recently, thin-film transistors (TFTs) have been attracted much attention. We have investigated the performance oxide thin film transistors with an amorphous indium gallium zinc oxide (-IGZO) channel and ZrO2/HfO2 gate dielectrics. The -IGZO has been reco...

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Bibliographic Details
Main Authors: Pan, Chun-Hua, 潘俊華
Other Authors: 荊鳳德
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/24666885079451811461