Implementation of monolithic magnetometer and accelerometer combo sensor with readout circuit on standard CMOS
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 101 === A monolithic accelerometer and magnetometer with integrated capacitance to voltage readout circuit in 0.18um CMOS MEMS process is proposed. The sensing range of the combo sensor is ±5g and ±70µT. The variation of the capacitance is ±4.5fF and ±0.63fF. The s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28378763012686999772 |