Fabrication and Characterization of N-Type Junctionless Poly-Si Thin-Film Transistors
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 101 === In this thesis, we have fabricated in situ n-type junctionless (JL) poly-Si thin-film transistors (TFTs) and aimed at investigating the electrical properties of the devices and developing a fabrication process capable of fabricating devices with sub-lit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wqkncq |