Design of a Monolithic Micro-accelerometer with a Readout Circuit of Tunable Sensitivity
碩士 === 國立交通大學 === 電子研究所 === 101 === The accelerometer is fabricated in 0.18µm ASIC-compatible CMOS MEMS technology and, with the assistant of low noise gain tunable interface being combined with 2nd Sigma-Delta Modulator (SDM) A/D converter in the proposed work. The linear decibel variable gain ampl...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/72592694972019482266 |