Fabrication of a reliable free-standing transmission grating for extreme ultraviolet interfermetric lithography
碩士 === 國立成功大學 === 光電科學與工程學系 === 101 === In the experiment of transmission grating window fabrication, KOH etching process is the commonly used tool for fabrication of the windows. However, KOH etching process is not easy to control. Therefore, we proposed the use of nano-imprint and sacrificial laye...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36465531675852540368 |