Study and Implementation of Class-E Inverter for RF Plasma Power Supply
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 101 === In this thesis, a low-pressure radio-frequency plasma power supply is analyzed and implemented. The plasma power system consists of three stages, including the first stage of a boost power factor correction (PFC) circuit, the second stage of asymmetrical half...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48739033418700508161 |