Application of metal silicide thin film to electrode of photodetectors

碩士 === 國立成功大學 === 電機工程學系碩博士班 === 101 === This thesis reported on the application of metal silicide thin film to electrode of photodectors. The relationship between the phase transitions and sheet resistance of metal silicide films, nickel silicide and ytterbium silicide, were discussed. The sheet re...

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Bibliographic Details
Main Authors: Yi-YinHo, 何怡瑩
Other Authors: Chuan-Feng Shih
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/92573296750750005274