Application of metal silicide thin film to electrode of photodetectors
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 101 === This thesis reported on the application of metal silicide thin film to electrode of photodectors. The relationship between the phase transitions and sheet resistance of metal silicide films, nickel silicide and ytterbium silicide, were discussed. The sheet re...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/92573296750750005274 |