Study of TiO2 thin films grown by atomic layer deposition and development of solid-liquid heterojunction ultraviolet photodetector based on TiO2 active layer
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 101 === In this study, TiO2 films were grown by an atomic layer deposition (ALD) system using TiCl4 and H2O as precursors. The results demonstrate that the ALD system possesses excellent uniformity, high conformity, and accuracy in thickness-control of films due t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37884573324820976073 |