To Explore the Semiconductor Equipment’s Manufacturing Process Defects Using the TRIZ Method

• Main Authors: Ming-HungWu, 吳明鴻
• Other Authors: Hui-Zhou Shao
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/19116744233691649570

碩士 === 國立成功大學 === 工學院工程管理碩士在職專班 === 101 === Semiconductor manufacturing faces numerous challenges and increased complexity in yield improvement, defect reduction and equipment related issues. Innovation is a key to stay ahead of the competitors. This paper will introduce a systematic innovation methodology called Theory of Inventive Problem Solving (TRIZ). TRIZ is a recognized international science of creativity, based on the laws of physics and innovative patents refined to numerous problem solving tools. Troubles to be constructed through the substance field analysis model, after find out the contradictory parameters, we use the contradiction matrix for seeking corresponding inventive principles. The problem root-cause analysis will be used mostly for task concentration while TRIZ will be used for hardware part redesigns and overall motion process optimization. This study provides the problem’s solution inference example with the practical application by TRIZ that get rid of the trouble in equipment’s process. And expect it could be helpful to depend on the thus example inference process, let those mediocre my generation, according the systematic methods to make the idea final solutions with inventive experts comparable. Shorten the process time of inventive ploblem and improve the engineer’s trouble shooting ability independently.