To Explore the Semiconductor Equipment’s Manufacturing Process Defects Using the TRIZ Method
碩士 === 國立成功大學 === 工學院工程管理碩士在職專班 === 101 === Semiconductor manufacturing faces numerous challenges and increased complexity in yield improvement, defect reduction and equipment related issues. Innovation is a key to stay ahead of the competitors. This paper will introduce a systematic innovation meth...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19116744233691649570 |