a-SiC:H thin film solar cells
碩士 === 國立中興大學 === 電機工程學系所 === 101 === In this thesis, hydrogenated amorphous silicon carbide (a-SiC:H) thin-film solar cells were prepared by using 13.56 MHz pulse-modulation plasma-enhanced chemical vapor deposition (Pulse-PECVD). (1) Modulation of plasma turn-on time (ton) to fabricate single i-la...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/4bd5ev |