A phase extraction algorithm for random three-step phase shifting digital interference microscopes
碩士 === 國立中興大學 === 機械工程學系所 === 101 === The surface topography is important technology in the semiconductor and optical component manufacturing. Now, the Phase Shifting Interferometry is application of reconstructed image and display the true height. The effectively display the true height for Phase...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/495589 |