Atomic layer deposition of oxide semiconductor films and their applications in the transparent conductive layers of GaN-based light emitting diodes
博士 === 國立中興大學 === 物理學系所 === 101 === In this dissertation, metal oxide films including zinc oxide (ZnO), gallium doped zinc oxide (GZO), indium doped zinc oxide (IZO) and indium oxide (In2O3) were grown by using atomic layer deposition (ALD). Diethylzinc (DEZn), triethylgallium (TEGa), trimethylindiu...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28772128445799934264 |