The p-type amorphous boron carbon thin film alloy prepared by radio-frequency reactive sputtering/plasma-enhanced chemical vapor deposition and its applications for solar cells
博士 === 國立中興大學 === 材料科學與工程學系所 === 101 === The effects of different process parameters on the characteristics of p-type amorphous boron carbon (a-BC) thin film alloys prepared by radio-frequency (RF) reactive sputtering/plasma-enhanced chemical vapor deposition (PECVD) are investigated. The process...
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52800132292101256598 |