A Study on the Application of Different Patterned Sapphire Substrate for GaN Light-Emitting Diodes
碩士 === 國立中興大學 === 光電工程研究所 === 101 === In this research, the patterned sapphire substrates, were fabricated by the dry etching、wet etching and two-step wet etching and were used to make the blue ray LED respectively. And the SEM was used to inspect the pattern size, etching depth and pattern morphol...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71141804504238701744 |