Buffer-Facilitated Epitaxial Growth of Zinc Gallate Film
碩士 === 明志科技大學 === 材料工程研究所 === 101 === The growth zinc gallate thin films using RF magnetron sputtering.0.3-μm-thick zinc gallate films were grown epitaxially form amorphous matrix by annealing if thin buffers of titanium nitride were sandwiched between zinc gallate and substrate. Nucleus and growth o...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/24385339692669516295 |