| Summary: | 碩士 === 崑山科技大學 === 電機工程研究所 === 102 === The main purpose of this paper is to design a high-power electromagnetic transmission line, used in plasma machines Plasma Enhanced Chemical Vapor Deposition (PECVD), to enhance the degree of dissociation and plasma uniformity. Direct and use the electromagnetic energy is fed into the vacuum chamber, a large area of parallel metal plates, electromagnetic field analysis and feasibility assessment. For plasma enhanced chemical vapor deposition system, to produce a uniform plasma must first establish a uniform electromagnetic field.
This thesis focuses on the development of large-area and uniform electromagnetic waves used to excite the plasma in order to produce ahomogeneous plasma sources and plasma used in various industrial processes.
This paper transmission line can be designed so that large electrode plates (1.1 m × 1.2 m) field uniformity reach 5% used in the large-scale solar PECVD process has reached 5% of demand。This paper is to use HFSS (High Frequency Structure Simulator) simulation software to simulate and optimize the self-power divider, trying to take advantage of multi-fed principles, will assign a single RF source is fed into a four-point, its better to achieve uniform purpose; future can be used in the surface of the material handling aspects, handling a large area coating to achieve a uniform coating of value。
Keywords： RF, power splitter, a large area, the transmission line
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