Design of RF trans mission line module for feeding ports
碩士 === 崑山科技大學 === 電機工程研究所 === 102 === The main purpose of this paper is to design a high-power electromagnetic transmission line, used in plasma machines Plasma Enhanced Chemical Vapor Deposition (PECVD), to enhance the degree of dissociation and plasma uniformity. Direct and use the electromagnetic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33965705394381057280 |